Abstract
Low-frequency excess noise was measured in a series of GaN epitaxial films deposited by RF-plasma assisted molecular beam epitaxy (MBE). The GaN epitaxial layers were grown on double buffer layers, each consisting of an intermediate-temperature buffer layer (ITBL) deposited at 690°C and a conventional low-temperature buffer layer grown at 500°C. The Hooge parameters for the as-grown films were found to depend on the thickness of ITBL with a minimum value of 7.34 × 10 -2 for an optimal ITBL thickness of 800 nm. The observed improvements in the noise properties are attributed to the relaxation of residual strain within the material, leading to a corresponding reduction in crystalline defects.
Original language | English |
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Pages (from-to) | 2400-2404 |
Number of pages | 5 |
Journal | IEEE Transactions on Electron Devices |
Volume | 48 |
Issue number | 10 |
DOIs | |
Publication status | Published - Oct 1 2001 |
Externally published | Yes |
Keywords
- Gallium nitride
- Intermediate-temperature buffer layer
- Low-frequency noise
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering