Study of the effect of irradiation with Fe 7+ ions on the structural properties of thin TiO 2 foils

K. Dukenbayev, A. Kozlovskiy, I. Kenzhina, A. Berguzinov, M. Zdorovets

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7 Citations (Scopus)


Thin foils based on the TiO2 phase of brookite, 620 nmthick,were obtained bymagnetron sputtering. The sampleswere irradiated at theDC-60 heavy ion accelerator of the Astana branch of the Institute ofNuclear Physicswith Fe 7+ ions with an energy of 85 MeVwith a fluence of 1 × 10 11 to 1 × 10 14 ions cm -2 . The dependences of the change in the concentration of defects in the structure of thin films on the radiation dose are established. It has been established that an increase in the irradiation fluence of up to 10 14 ions cm -2 , characteristic of the formation of defect overlap regions, leads to a sharp decrease in the degree of crystallinity and an increase in the lattice parameters. That is caused by the formation of a large number of disorder regions and displaced atoms in the structure, whichmigrate along the crystal lattice to additional distortions and voltages,with the subsequent formation of hillocks.

Original languageEnglish
Article number046309
JournalMaterials Research Express
Issue number4
Publication statusPublished - Jan 1 2019


  • Crystal structure defects
  • Ionizing radiation
  • Magnetron sputtering
  • Thin foils

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Biomaterials
  • Surfaces, Coatings and Films
  • Polymers and Plastics
  • Metals and Alloys

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