Surface erosion and modification by ions studied by computer simulation

Z. Insepov, J. Norem, D. R. Swenson, A. Hassanein, M. Terasawa

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

Surface erosion problems common in the development of TeV accelerators and of the extreme ultra-violet lithography (EUVL) devices have been reviewed. The gas cluster ion beam (GCIB) surface smoothing technique can mitigate them. It has recently been realized that GCIB can also be used to determine the basic mechanisms of the Q-slope that is yet another serious problem for the high-gradient linacs. Mechanisms of surface erosion by GCIB and highly-charged ions (HCI) bombardments were studied by using computer simulation. Sputtering, crater formation and surface modification models were developed. Various mechanisms of the ion energy transfer into the solid target, such as shock wave generation, hollow atom formation, Coulomb explosion, charge screening and neutralization were analyzed.

Original languageEnglish
Pages (from-to)172-177
Number of pages6
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume258
Issue number1
DOIs
Publication statusPublished - May 2007
Externally publishedYes

Fingerprint

Ion beams
erosion
Erosion
computerized simulation
Gases
Ions
ion beams
Computer simulation
Extreme ultraviolet lithography
ions
gases
Ion bombardment
Shock waves
Energy transfer
Explosions
Particle accelerators
Sputtering
Surface treatment
wave generation
Screening

Keywords

  • Coulomb explosion
  • Crater formation
  • Electronic excitation
  • Gas cluster ion beam
  • Highly-charged ion
  • Molecular dynamics
  • Shock wave
  • Sputtering

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

Cite this

Surface erosion and modification by ions studied by computer simulation. / Insepov, Z.; Norem, J.; Swenson, D. R.; Hassanein, A.; Terasawa, M.

In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 258, No. 1, 05.2007, p. 172-177.

Research output: Contribution to journalArticle

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