Abstract
Surface erosion problems common in the development of TeV accelerators and of the extreme ultra-violet lithography (EUVL) devices have been reviewed. The gas cluster ion beam (GCIB) surface smoothing technique can mitigate them. It has recently been realized that GCIB can also be used to determine the basic mechanisms of the Q-slope that is yet another serious problem for the high-gradient linacs. Mechanisms of surface erosion by GCIB and highly-charged ions (HCI) bombardments were studied by using computer simulation. Sputtering, crater formation and surface modification models were developed. Various mechanisms of the ion energy transfer into the solid target, such as shock wave generation, hollow atom formation, Coulomb explosion, charge screening and neutralization were analyzed.
| Original language | English |
|---|---|
| Pages (from-to) | 172-177 |
| Number of pages | 6 |
| Journal | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms |
| Volume | 258 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - May 2007 |
| Externally published | Yes |
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Keywords
- Coulomb explosion
- Crater formation
- Electronic excitation
- Gas cluster ion beam
- Highly-charged ion
- Molecular dynamics
- Shock wave
- Sputtering
ASJC Scopus subject areas
- Surfaces, Coatings and Films
- Instrumentation
- Surfaces and Interfaces
Cite this
Surface erosion and modification by ions studied by computer simulation. / Insepov, Z.; Norem, J.; Swenson, D. R.; Hassanein, A.; Terasawa, M.
In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 258, No. 1, 05.2007, p. 172-177.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Surface erosion and modification by ions studied by computer simulation
AU - Insepov, Z.
AU - Norem, J.
AU - Swenson, D. R.
AU - Hassanein, A.
AU - Terasawa, M.
PY - 2007/5
Y1 - 2007/5
N2 - Surface erosion problems common in the development of TeV accelerators and of the extreme ultra-violet lithography (EUVL) devices have been reviewed. The gas cluster ion beam (GCIB) surface smoothing technique can mitigate them. It has recently been realized that GCIB can also be used to determine the basic mechanisms of the Q-slope that is yet another serious problem for the high-gradient linacs. Mechanisms of surface erosion by GCIB and highly-charged ions (HCI) bombardments were studied by using computer simulation. Sputtering, crater formation and surface modification models were developed. Various mechanisms of the ion energy transfer into the solid target, such as shock wave generation, hollow atom formation, Coulomb explosion, charge screening and neutralization were analyzed.
AB - Surface erosion problems common in the development of TeV accelerators and of the extreme ultra-violet lithography (EUVL) devices have been reviewed. The gas cluster ion beam (GCIB) surface smoothing technique can mitigate them. It has recently been realized that GCIB can also be used to determine the basic mechanisms of the Q-slope that is yet another serious problem for the high-gradient linacs. Mechanisms of surface erosion by GCIB and highly-charged ions (HCI) bombardments were studied by using computer simulation. Sputtering, crater formation and surface modification models were developed. Various mechanisms of the ion energy transfer into the solid target, such as shock wave generation, hollow atom formation, Coulomb explosion, charge screening and neutralization were analyzed.
KW - Coulomb explosion
KW - Crater formation
KW - Electronic excitation
KW - Gas cluster ion beam
KW - Highly-charged ion
KW - Molecular dynamics
KW - Shock wave
KW - Sputtering
UR - http://www.scopus.com/inward/record.url?scp=34147114327&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=34147114327&partnerID=8YFLogxK
U2 - 10.1016/j.nimb.2006.12.117
DO - 10.1016/j.nimb.2006.12.117
M3 - Article
AN - SCOPUS:34147114327
VL - 258
SP - 172
EP - 177
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
SN - 0168-583X
IS - 1
ER -