Surface modification with ionised cluster beams: Modelling

Z. Insepov, I. Yamada

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

Impacts of accelerated cluster ions which consist of hundreds of atoms on a solid surface have shown new surface smoothing and roughening effects. Hybrid Molecular Dynamics (MD) and a two-dimensional MD method were used to simulate rapid collision processes at the target impact zone and the subsequent thermalization. Gas clusters impacting on metal and semiconductor target surfaces have been considered to study the ripple formation under irradiation with oblique cluster beams. The dynamics of surface modification is simulated by using a discrete model which contains crater formation and surface relaxation. The continuum description of a surface relaxation is based on a dynamics equation for surface heights containing viscous flow, surface tension, surface diffusion, and crater formation terms. Comparison of the results of the simulation with experimental data shows qualitative agreement.

Original languageEnglish
Pages (from-to)121-125
Number of pages5
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume148
Issue number1-4
Publication statusPublished - 1999
Externally publishedYes

Fingerprint

Surface treatment
Surface relaxation
Molecular dynamics
craters
Surface diffusion
Viscous flow
molecular dynamics
Surface tension
Gases
Metals
Irradiation
viscous flow
Ions
Semiconductor materials
surface diffusion
ripples
smoothing
solid surfaces
Atoms
interfacial tension

Keywords

  • Cluster
  • Crater
  • Diffusion
  • Ion
  • Ripple
  • Viscous

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

Cite this

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AU - Insepov, Z.

AU - Yamada, I.

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AB - Impacts of accelerated cluster ions which consist of hundreds of atoms on a solid surface have shown new surface smoothing and roughening effects. Hybrid Molecular Dynamics (MD) and a two-dimensional MD method were used to simulate rapid collision processes at the target impact zone and the subsequent thermalization. Gas clusters impacting on metal and semiconductor target surfaces have been considered to study the ripple formation under irradiation with oblique cluster beams. The dynamics of surface modification is simulated by using a discrete model which contains crater formation and surface relaxation. The continuum description of a surface relaxation is based on a dynamics equation for surface heights containing viscous flow, surface tension, surface diffusion, and crater formation terms. Comparison of the results of the simulation with experimental data shows qualitative agreement.

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KW - Ripple

KW - Viscous

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