Abstract
New aspects of surface treatment by gas cluster ion beams are discussed. Molecular dynamics simulation has shown that a considerably high damage region is formed at a depth exceeding the mean projected range of the implanted atoms. High yield sputtering has also been shown to occur with respect to lateral sputtering. Experiments on shallow implantation, high yield sputtering, surface smoothing and low damage surface cleaning were performed. The obtained results are compared with those of conventional monomer ion irradiation. Possible applications of ionized cluster beams to a new area of surface modifications are discussed.
| Original language | English |
|---|---|
| Pages (from-to) | 165-169 |
| Number of pages | 5 |
| Journal | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms |
| Volume | 106 |
| Issue number | 1-4 |
| DOIs | |
| Publication status | Published - Dec 2 1995 |
| Externally published | Yes |
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ASJC Scopus subject areas
- Instrumentation
- Nuclear and High Energy Physics
Cite this
Surface modifications by gas cluster ion beams. / Yamada, I.; Matsuo, J.; Insepov, Z.; Akizuki, M.
In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 106, No. 1-4, 02.12.1995, p. 165-169.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Surface modifications by gas cluster ion beams
AU - Yamada, I.
AU - Matsuo, J.
AU - Insepov, Z.
AU - Akizuki, M.
PY - 1995/12/2
Y1 - 1995/12/2
N2 - New aspects of surface treatment by gas cluster ion beams are discussed. Molecular dynamics simulation has shown that a considerably high damage region is formed at a depth exceeding the mean projected range of the implanted atoms. High yield sputtering has also been shown to occur with respect to lateral sputtering. Experiments on shallow implantation, high yield sputtering, surface smoothing and low damage surface cleaning were performed. The obtained results are compared with those of conventional monomer ion irradiation. Possible applications of ionized cluster beams to a new area of surface modifications are discussed.
AB - New aspects of surface treatment by gas cluster ion beams are discussed. Molecular dynamics simulation has shown that a considerably high damage region is formed at a depth exceeding the mean projected range of the implanted atoms. High yield sputtering has also been shown to occur with respect to lateral sputtering. Experiments on shallow implantation, high yield sputtering, surface smoothing and low damage surface cleaning were performed. The obtained results are compared with those of conventional monomer ion irradiation. Possible applications of ionized cluster beams to a new area of surface modifications are discussed.
UR - http://www.scopus.com/inward/record.url?scp=58149209589&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=58149209589&partnerID=8YFLogxK
U2 - 10.1016/0168-583X(95)00697-4
DO - 10.1016/0168-583X(95)00697-4
M3 - Article
VL - 106
SP - 165
EP - 169
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
SN - 0168-583X
IS - 1-4
ER -