TY - JOUR
T1 - Surface modifications by gas cluster ion beams
AU - Yamada, I.
AU - Matsuo, J.
AU - Insepov, Z.
AU - Akizuki, M.
N1 - Funding Information:
Our gas cluster researchi s supportedb y a funding from the Ministry of Educationo f Japan and the new technology development program of the Ministry of Science and Technology. The authorsg reatly appreciatet he long term supporto f this program.T he authorsa lso wish to acknowledge intensive discussions of the results obtained in our Laboratory with Assoc. Prof. G.H. Takaoka and visiting Prof. C. Ascheron. The authors also wish to acknowledge the experimentals upporto f M. Harada and S. Ogasawara. One of the authors( M.A.) would also like to thank Dr. K. Yoneda, A. Doi and Dr. T. Niina of Sanyo Electric Co. Ltd. for their continuouse ncouragement.
Copyright:
Copyright 2014 Elsevier B.V., All rights reserved.
PY - 1995/12/2
Y1 - 1995/12/2
N2 - New aspects of surface treatment by gas cluster ion beams are discussed. Molecular dynamics simulation has shown that a considerably high damage region is formed at a depth exceeding the mean projected range of the implanted atoms. High yield sputtering has also been shown to occur with respect to lateral sputtering. Experiments on shallow implantation, high yield sputtering, surface smoothing and low damage surface cleaning were performed. The obtained results are compared with those of conventional monomer ion irradiation. Possible applications of ionized cluster beams to a new area of surface modifications are discussed.
AB - New aspects of surface treatment by gas cluster ion beams are discussed. Molecular dynamics simulation has shown that a considerably high damage region is formed at a depth exceeding the mean projected range of the implanted atoms. High yield sputtering has also been shown to occur with respect to lateral sputtering. Experiments on shallow implantation, high yield sputtering, surface smoothing and low damage surface cleaning were performed. The obtained results are compared with those of conventional monomer ion irradiation. Possible applications of ionized cluster beams to a new area of surface modifications are discussed.
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U2 - 10.1016/0168-583X(95)00697-4
DO - 10.1016/0168-583X(95)00697-4
M3 - Article
AN - SCOPUS:58149209589
VL - 106
SP - 165
EP - 169
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
SN - 0168-583X
IS - 1-4
ER -