Surface modifications by gas cluster ion beams

I. Yamada; J. Matsuo; Z. Insepov; M. Akizuki

doi:10.1016/0168-583X(95)00697-4

Surface modifications by gas cluster ion beams

I. Yamada, J. Matsuo, Z. Insepov, M. Akizuki

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Abstract

New aspects of surface treatment by gas cluster ion beams are discussed. Molecular dynamics simulation has shown that a considerably high damage region is formed at a depth exceeding the mean projected range of the implanted atoms. High yield sputtering has also been shown to occur with respect to lateral sputtering. Experiments on shallow implantation, high yield sputtering, surface smoothing and low damage surface cleaning were performed. The obtained results are compared with those of conventional monomer ion irradiation. Possible applications of ionized cluster beams to a new area of surface modifications are discussed.

Original language	English
Pages (from-to)	165-169
Number of pages	5
Journal	Nuclear Inst. and Methods in Physics Research, B
Volume	106
Issue number	1-4
DOIs	https://doi.org/10.1016/0168-583X(95)00697-4
Publication status	Published - Dec 2 1995

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ASJC Scopus subject areas

Nuclear and High Energy Physics
Instrumentation

Cite this

Yamada, I., Matsuo, J., Insepov, Z., & Akizuki, M. (1995). Surface modifications by gas cluster ion beams. Nuclear Inst. and Methods in Physics Research, B, 106(1-4), 165-169. https://doi.org/10.1016/0168-583X(95)00697-4

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AU - Akizuki, M.

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N2 - New aspects of surface treatment by gas cluster ion beams are discussed. Molecular dynamics simulation has shown that a considerably high damage region is formed at a depth exceeding the mean projected range of the implanted atoms. High yield sputtering has also been shown to occur with respect to lateral sputtering. Experiments on shallow implantation, high yield sputtering, surface smoothing and low damage surface cleaning were performed. The obtained results are compared with those of conventional monomer ion irradiation. Possible applications of ionized cluster beams to a new area of surface modifications are discussed.

AB - New aspects of surface treatment by gas cluster ion beams are discussed. Molecular dynamics simulation has shown that a considerably high damage region is formed at a depth exceeding the mean projected range of the implanted atoms. High yield sputtering has also been shown to occur with respect to lateral sputtering. Experiments on shallow implantation, high yield sputtering, surface smoothing and low damage surface cleaning were performed. The obtained results are compared with those of conventional monomer ion irradiation. Possible applications of ionized cluster beams to a new area of surface modifications are discussed.

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Access to Document

10.1016/0168-583X(95)00697-4