The fabrication of suspended micromechanical structures from bulk 6H-SiC using an ICP-RIE system

Tim K. Hossain; Scott MacLaren; Jonathan M. Engel; Chang Liu; Ilesanmi Adesida; Robert S. Okojie

doi:10.1088/0960-1317/16/4/011

The fabrication of suspended micromechanical structures from bulk 6H-SiC using an ICP-RIE system

Tim K. Hossain, Scott MacLaren, Jonathan M. Engel, Chang Liu, Ilesanmi Adesida, Robert S. Okojie

Nazarbayev University

Research output: Contribution to journal › Article › peer-review

30 Citations (Scopus)

Abstract

We have successfully fabricated freestanding single-crystal 6H-SiC cantilevers of several microns size using bulk micromachining with an inductively coupled plasma reactive ion etching system. We have also used these SiC cantilever structures to measure Young's modulus through the use of an atomic force microscope. The measurements were performed on a series of 13 νm thick and 20 νm wide cantilevers with lengths ranging from 100 νm to 350 νm. The average measured Young's modulus of 441 GPa is in excellent agreement with the documented values in the literature.

Original language	English
Pages (from-to)	751-756
Number of pages	6
Journal	Journal of Micromechanics and Microengineering
Volume	16
Issue number	4
DOIs	https://doi.org/10.1088/0960-1317/16/4/011
Publication status	Published - Apr 1 2006

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Mechanics of Materials
Mechanical Engineering
Electrical and Electronic Engineering

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title = "The fabrication of suspended micromechanical structures from bulk 6H-SiC using an ICP-RIE system",

abstract = "We have successfully fabricated freestanding single-crystal 6H-SiC cantilevers of several microns size using bulk micromachining with an inductively coupled plasma reactive ion etching system. We have also used these SiC cantilever structures to measure Young's modulus through the use of an atomic force microscope. The measurements were performed on a series of 13 νm thick and 20 νm wide cantilevers with lengths ranging from 100 νm to 350 νm. The average measured Young's modulus of 441 GPa is in excellent agreement with the documented values in the literature.",

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AU - Liu, Chang

AU - Adesida, Ilesanmi

AU - Okojie, Robert S.

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AB - We have successfully fabricated freestanding single-crystal 6H-SiC cantilevers of several microns size using bulk micromachining with an inductively coupled plasma reactive ion etching system. We have also used these SiC cantilever structures to measure Young's modulus through the use of an atomic force microscope. The measurements were performed on a series of 13 νm thick and 20 νm wide cantilevers with lengths ranging from 100 νm to 350 νm. The average measured Young's modulus of 441 GPa is in excellent agreement with the documented values in the literature.

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The fabrication of suspended micromechanical structures from bulk 6H-SiC using an ICP-RIE system

Abstract

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