The fabrication of suspended micromechanical structures from bulk 6H-SiC using an ICP-RIE system

Tim K. Hossain, Scott MacLaren, Jonathan M. Engel, Chang Liu, Ilesanmi Adesida, Robert S. Okojie

Research output: Contribution to journalArticlepeer-review

29 Citations (Scopus)

Abstract

We have successfully fabricated freestanding single-crystal 6H-SiC cantilevers of several microns size using bulk micromachining with an inductively coupled plasma reactive ion etching system. We have also used these SiC cantilever structures to measure Young's modulus through the use of an atomic force microscope. The measurements were performed on a series of 13 νm thick and 20 νm wide cantilevers with lengths ranging from 100 νm to 350 νm. The average measured Young's modulus of 441 GPa is in excellent agreement with the documented values in the literature.

Original languageEnglish
Pages (from-to)751-756
Number of pages6
JournalJournal of Micromechanics and Microengineering
Volume16
Issue number4
DOIs
Publication statusPublished - Apr 1 2006

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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